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gFormation and Characterization of Tensile-strained Ge layers on Ge1-xSnx Buffer Layersh,
Y. Shimura, N. Tsutsui, O. Nakatsuka, A. Sakai, and S. Zaima,
The IUMRS International Conference in Asia 2008 (IUMRS-ICA 2008),
Nagoya, Japan, Dec. 9-13, 2008.
gStrain and interfacial defects in directly bonded Si substratesh,
Y. Ohara, T. Ueda, A. Sakai, O. Nakatsuka, S. Zaima, E. Toyoda, K. Izunome, H. Tajiri, O. Sakata and S. Kimura,
The IUMRS International Conference in Asia 2008 (IUMRS-ICA 2008),
Nagoya, Japan, Dec. 9-13, 2008.
gAtomistic analysis of directly bonded Si substrate interfaceh,
T. Ueda, Y. Ohara, A. Sakai, O. Nakatsuka, S. Zaima, E. Toyoda, K. Izunome, T. Sakata, and H. Mori,
The IUMRS International Conference in Asia 2008 (IUMRS-ICA 2008),
Nagoya, Japan, Dec. 9-13, 2008.
2007
- Invited: gStrain and dislocations in group IV semiconductor heterostructuresh, A. Sakai,
O. Nakatsuka, M. Ogawa, and S. Zaima, Materials Research Society 2007 Spring Meeting,
San Francisco, USA, Apr. 9-13, 2007.
- gCharacterization of bonding structures of directly bonded hybrid crystal orientation
substratesh, E. Toyoda, A. Sakai, H. Isogai, T. Senda, K. Izunome, O. Nakatsuka,
M. Ogawa, and S. Zaima, 5th International Conference on Silicon Epitaxy and Heterostructures,
pp. 337-338, Marseille, France, May 20-25, 2007.
- gFormation of high-density Si nanodots by agglomeration of ultra-thin amorphous
Si filmsh, H. Kondo, T. Ueyama, E. Ikenaga, K. Kobayashi, A. Sakai, M. Ogawa, and
S. Zaima, 5th International Conference on Silicon Epitaxy and Heterostructures,
pp. 305-306, Marseille, France, May 20-25, 2007.
- Invited: gSilicide and germanide technology for contacts and gates in MOSFET applicationsh,
S. Zaima, 5th International Conference on Silicon Epitaxy and Heterostructures,
pp. 71-72, Marseille, France, May 20-25, 2007.
- gTensile strained Ge layers on strain-relaxed Ge1-xSnx/virtual Ge substratesh, S. Takeuchi, A. Sakai, O. Nakatsuka, M. Ogawa, and S. Zaima, 5th
International Conference on Silicon Epitaxy and Heterostructures, pp. 36-37, Marseille,
France, May 20-25, 2007.
- gImpact of Pt Incorporation on Thermal Stability of NiGe Layers on Ge(001) Substratesh,
O. Nakatsuka, A. Suzuki, A. Sakai, M. Ogawa, and S. Zaima, 7th International Workshop
on Junction Technology 2007, pp. 87-88, Kyoto, Japan, June 8-9, 2007.
- gDevelopment of new high-density radical sources and its application to radical
nitridation of Ge surfacesh, H. Kondo, S. Oda, S. Takashima, A. Sakai, M. Ogawa,
S. Zaima, M. Hori, S. Den, H. Kano, The 20th Symposium on Plasma Science for Materials,
p. 128, Nagoya, Japan, June 21-22, 2007.
- gPr-Oxide-Based Dielectric Films on Ge Substratesh, M. Sakashita, N. Kito,
A. Sakai, H. Kondo, O. Nakatsuka, M. Ogawa and S. Zaima, 2007 International Conference
on Solid State Devices and Materials, Tsukuba, Japan, Sept. 18-21, 2007.
- gCrystalline and electrical properties of mictamict TiSiN gate MOS capacitorsh,
K. Furumai, H. Kondo, M. Sakashita, A. Sakai, M. Ogawa and S. Zaima, 2007 International
Conference on Solid State Devices and Materials, Tsukuba, Japan, Sept. 18-21, 2007.
- gSurface Treatment of Ge(001) Surface by Radical Nitridationh, H. Kondo, M. Fujita,
A. Sakai, M. Ogawa and S. Zaima, 2007 International Conference on Solid State Devices
and Materials, Tsukuba, Japan, Sept. 18-21, 2007.
- gDependence of Electrical Characteristics on Interfacial
Structures of Epitaxial NiSi2/Si Schottky Contacts Formed from Ni/Ti/Si Systemh,
O. Nakatsuka, A. Suzuki, S. Akimoto, A. Sakai, M. Ogawa and S. Zaima, 2007
International Conference on Solid State Devices and Materials, Tsukuba, Japan, Sept.
18-21, 2007.
- Invited: gSilicide and Germanide Technology for Contacts and Metal
Gates in MOSFET Applicationsh, S. Zaima, O. Nakatsuka, H. Kondo, M. Sakashita, A.
Sakai, and M. Ogawa, 212th Electrochemical Society Meeting, Washington D.C., USA,
Oct. 7-12, 2007.
- gContact Propeties of Epitaxial NiSi2/Heavily
Doped Si Structures Formed from Ni/Ti/Si
Systemsh, S. Akimoto, O. Nakatsuka, A. Suzuki, A. Sakai, M. Ogawa, and S. Zaima,
Advanced Metallization Conference 2007: 17th Asian Session, pp. 90-91, Tokyo, Japan,
Oct. 23-24, 2007.
- gStructural and Electrical Properties of Metal-germanide MOS Gate Electrodesh, H.
Kondo, D. Ikeno, Y. Kaneko, M. Sakashita, A. Sakai, M. Ogawa, and S. Zaima, The
Sixth Pacific Rim Inernational Conference on Advanced Materials and Processing,
p. 26, Jeju, Korea, Nov. 5-9, 2007.
- gElectrical and Crystalline Properties of Epitaxial NiSi2/Si
Contacts Fromed in
Ni/Ti/Si(001) Systemsh, O. Nakatsuka, A. Suzuki, S. Akimoto, A. Sakai, M. Ogawa,
and S. Zaima, The Sixth Pacific Rim Inernational Conference on Advanced Materials
and Processing, p. 72, Jeju, Korea, Nov. 5-9, 2007.
- gTensile Strained Ge Layers Grown on Compositionally Step-Graded Ge1-xSnx
Buffer Layersh, Y. Shimura, S. Takeuchi, A. Sakai, O. Nakatsuka, M. Ogawa, and S.
Zaima, The 3nd international workshop on new group IV semiconductor nanoelectronics,
pp. 29-30, Sendai, Japan, Nov. 8-9, 2007.
- Invited: gGrowth and Characterization of Tensile-Strained Ge Layers
on Strain Relaxed Ge1-xSnx Buffer Layersh, O. Nakatsuka, S. Takeuchi, A. Sakai,
M. Ogawa, and S. Zaima, The 3nd international workshop on new
group IV semiconductor nanoelectronics, pp. 75-76, Sendai, Japan, Nov. 8-9, 2007.
- Invited: gDefect Control for Ge/Si and Ge1-xSnx/Ge/Si
Heterostructuresh, A. Sakai, S. Takeuchi, O. Nakatsuka, M. Ogawa, and S. Zaima,
Fifth International Symposium on Control of Semiconductor Interfaces, pp. 31-32,
Tokyo, Japan, , Nov. 12-14, 2007.
- gCharacterization of Local Strains in Si1-xGex
Hetero-mesa Structures on Si(001) Substrates by Using X-ray Microdiffractionh, O.
Nakatsuka, K. Yukawa, S. Mochizuki, A. Sakai, K. Fukuda, S. Kimura, O. Sakata, K.
Izunome, T. Senda, E. Toyoda, M. Ogawa, and S. Zaima, Fifth International Symposium
on Control of Semiconductor Interfaces, pp. 41-42, Tokyo, Japan, Nov. 12-14, 2007.
- gScanning Tunneling Microscopy Observation of Initial Growth of Sn and Ge1-xSnx
Layers on Ge(001) Substratesh, M. Yamazaki, S. Takeuchi, O. Nakatsuka, A. Sakai,
M. Ogawa, and S. Zaima, Fifth International Symposium on Control of Semiconductor
Interfaces, pp. 85-86, Tokyo, Japan, Nov. 12-14, 2007.
- gEffect of alcohol sources on synthesis of single-walled carbon nanotubesh, S. Oida,
A. Sakai, O. Nakatuska, M. Ogawa, and S. Zaima, 9th International Conference
on Atomically Controlled Surfaces, Interfaces and Nanostructures, Tokyo, Japan,
Nov. 11-15, 2007.
- gFormation of high-density Si nanodots and characterization of chemical bonding
states by soft-X-ray photoelectron spectroscopyh, H. Kondo, 9th International Conference
on Atomically Controlled Surfaces, Interfaces and Nanostructures, Tokyo, Japan,
Nov. 11-15, 2007.
- Invited: gControlling Interface Properties of Silicide/Si Contacts
for Si ULSI Applicationsh, S. Zaima, O. Nakatsuka, A. Sakai, and M. Ogawa, 9th International
Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures, Tokyo,
Japan, Nov. 11-15, 2007.
2006
- gElectrical properties of epitaxial NiSi2/Si contacts
with extremely flat interface formed in Ni/Ti/Si(001) systemh, O.
Nakatsuka, A. Suzuki, A. Sakai, M. Ogawa, and S. Zaima, Materials for
Advanced Metallization Conference 2006, pp. 177-178, Grenoble, Frence,
Mar. 5-8, 2006.
- gSystematic Characterization of Ni Full Silicide in Sub-100 nm
Gate Regionsh, D. Ito, A. Sakai, O. Nakatsuka, H. Kondo, Y. Akasaka, M.
Ogawa, and S. Zaima, 2006 MRS Spring Meeting, San Francisco, USA, Apr.
17-21, 2006.
- Invited: gControl and
characterization of strain in SiGe/Si heterostructures with engineered
misfit dislocationsh, A. Sakai, N. Taoka, S. Mochizuki, K. Yukawa, O.
Nakatsuka, S. Takeda, S. Kimura, M. Ogawa, and S. Zaima, The third
International SiGe Technology and Device Meeting, pp. 232-233,
Princeton, USA, May 15-17, 2006.
- gStrain relaxation of patterned Ge and SiGe structures on Si(001)
substratesh, S. Mochizuki, A. Sakai, O. Nakatsuka, H. Kondo, K. Yukawa,
K. Izunome, T. Senda, E. Toyoda, M. Ogawa, and S. Zaima, The third
International SiGe Technology and Device Meeting, pp. 258-259,
Princeton, USA, May 15-17, 2006.
- gGrowth and structure evaluation of strain-relaxed Ge1-xSnx
buffer layers on virtual Ge(001) substratesh, S. Takeuchi, A. Sakai, K.
Yamamoto, O. Nakatsuka, M. Ogawa, and S. Zaima, The third International
SiGe Technology and Device Meeting, pp. 98-99, Princeton, USA, May
15-17, 2006.
- Invited: gNano-scale
Observations for Local Current Leakage in High-k Gate Dielectrics Using
Conductive-Atomic Force Microscopyh, S. Zaima, A. Seko, T. Sago, M.
Sakashita, A. Sakai, and M. Ogawa, The E-MRS 2006 Spring Meeting (E-MRS
- IUMRS - ICEM 06), Nice, France, May 29-June 2, 2006.
- Keynote Lecture: gSilicides and Related-Materials
for ULSI Applicationsh, S. Zaima, A. Sakai, and M. Ogawa, Asia-Pacific
Conference on Semiconducting Silicides: Science and Technology Towards
Substainable Optoelectronics, pp. 1-2, Kyoto, Japan, July 29-31, 2006.
- Invited lecture:
gNano-scale Observations for degradation phenomena in High-k gate
dielectrics using conductive-atomic force microscopyh, S. Zaima, A.
Seko, M. Sakashita, A. Sakai and M. Ogawa, The IUMRS International
Conference in Asia 2006 , Sept. 10-14, 2006, Jeju, Korea.
- gBehavior of Local Charge Trapping Sites in La2O3-Al2O3
Comosite Films under Constant Voltage Stressh, T. Sago, A. Seko, M.
Sakashita, A. Sakai, M. Ogawa, and S. Zaima, 2006 International
Conference on Solid State Devices and Materials, pp. 418-419, Sept.
12-15, 2006, Yokohama, Japan.
- gComparison Dependence of Work Function in Metal (Ni,
Pt)-Germanide Gate Electrodesh, D. Ikeno, K. Furumai, H. Kondo, M.
Sakashita, A. Sakai, M. Ogawa, and S. Zaima, 2006 International
Conference on Solid State Devices and Materials, pp. 442-443, Sept.
12-15, 2006, Yokohama, Japan.
-
Invited: gHard X-ray Photoelectron Spectroscopy Study on Buried
Interfaces in Next Generation CMOS Devicesh, T. Hattori and S. Zaima, The 2nd International
Workshop on Hard X-ray Photoelectron Spectroscopy, p. 20, Sept. 19-20, 2006, Hyogo,
Japan.
- gInterfacial Structure of HfON/SiN/Si Gate Stacksh, O. Nakatsuka,
M. Sakashita, H. Kondo, E. Ikenaga, M. Kobata, J.-J. Kim, H. Nohira, T.
Hattori, A. Sakai, M. Ogawa, S. Zaima, The 2nd International Workshop on
Hard X-ray Photoelectron Spectroscopy, p. 102, Sept. 19-20, 2006, Hyogo,
Japan.
- gDislocation Structure and Strain Relaxation of SiGe and Ge
Sub-micron Stripe Lines on Si(001) Substratesh, O. Nakatsuka, S.
Mochizuki, A. Sakai, H. Kondo, K. Yukawa, M. Ogawa, and S. Zaima, The
2nd International WorkShop on New Group IV Semiconductor
Nanoelectronics, pp. 69-70, Oct. 2-3, 2006, Sendai, Japan.
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